原理說明
Directly analyze particles in gas.
GED uses a very special membrane that exchanges sample gas and Ar gas, and particles come out from GED in nearly 99.99% Ar gas.
Metallic Standard Aerosol Generation (MSAG) device is used for calibration.
GED_SEMI model can analyze special gases such as HCl, NH3, CH3F, COS, CF4,HF, Cl2, SiHxCly.
The GED-semi is an automatic tool for directly gas online monitoring of metal contamination.
The GED-semi process SEMI-S2 certification, and fully integrated with ICPMS.
