原理說明
ExpertTM以全自動化的方式，經由氣相分解法（VPD），將晶圓（6吋、8吋、12吋、18吋）表面金屬不純物，以雙氧水與氫氟酸的混和液收集於液滴中，再經由自動取樣器進入感應耦合電漿質譜儀(ICP-MS)，進行後續各不純物元素計量。
Backside scanning.
Hydrophilic wafer scanning.
Poly-Si wafer and bulk etching test
Nobel metal test: At, Ag, Pt……
SiC wafer scanning.
Pattern wafer scanning.
Expert serial are including Expert-Lab, Expert-PS, and Expert-Fab.
Class 1 environment with Teflon ULPA filter media.
6”and 8” manual cassette, 8” SMIF, 12” FOSB and 12” FOUP are all available.
Full, Radial, S-Sector, R-Sector, edge, advanced edge scan mode.
The first fully automated VPD-ICPMS system in the world.
Low detection capability: 1E8 is general.
AMHS, integration with OHT (E84) and FAB interface/ CIM using SECS.